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The conditions in a cleanroom need to be verified and qualified repeatedly and continuously. For this tasks several measurement techniques  have been established. Particle counters are used to detect and analyze airborne particles. With a new measurement principle it is now also possible to measure sedimented particles and as such receive an additional value to define the air cleanliness in cleanrooms. More parameters like air speed, temperature, relative humidity, etc. have also have to be checked and recorded on a regular basis.

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